NF3
N2O
C4F8, R318, HC-318
C3F8, R218, HC-218
Allene, C3H4
C3H8, R290
C3H6
SiH4
SiF4
SO2
SF6
CF4
C4H8
CHF3, R23, HC-23
C3H10Si, 3MS
Xe