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Silicon Tetrafluoride (SiF4)

Silicon Tetrafluoride (SiF4) is a colorless, corrosive, non-flammable, toxic gas.

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Silicon Tetrafluoride

Formula: SiF4

What is Silicon Tetrafluoride (SiF4)?

Silicon Tetrafluoride is a colorless, corrosive, non-flammable, toxic gas. It has a very pungent odor similar to hydrochloric acid and is fatal if inhaled. The chemical compound has a silicone base with four arms of fluoride.

In the natural world, SiF4 is the main gas in some volcanic plumes. Silicon tetrafluoride can also be produced by reducing silicon halides, by the electrolysis of fused silica, or by heating barium hexafluorosilicate above 300° C.  Furthermore, silicon tetrafluoride is a by-product of fertilizer production.



Further Specifications

Cylinder Sizes

  • Manufacturing of fluosilicic acid and its salts
  • Specialty doping and deposition applications in semiconductor manufacturing
  • Organic synthesis
Grade 4
Purity 99.99%
Nitrogen < 3 ppmv
Oxygen + Argon < 1 ppmv
Carbon Dioxide < 1 ppmv
Carbon Monoxide < 0.5 ppmv
Methane < 10 ppmv
Hydrogen Fluoride < 50 ppmv
Arsenic < 0.5 ppmv
Boron < 0.5 ppmv
Phosphorus < 0.5 ppmv
Chemical & Physical Properties
Molecular Weight 104.8
Specific Volume 3.7 cu. ft/lb
Pressure @ 70°F 1000 psig
Valve Outlet CGA 330 DISS 642
Shipping Information
DOT Name Silicon Tetrafluoride
Hazard Class 2.3
DOT No. UN 1859
DOT Label Poison Gas, Corrosive
CAS No. 7783-61-1
Cylinder Size Fill Weight (lb)
44L/Size 200 80

FAQs about Silicon Tetrafluoride

Is silicon tetrafluoride (SiF4) dangerous?

Yes. Silicon tetrafluoride reacts with both water and air and is a toxic gas. Its corrosive vapors can be fatal if inhaled. Standard cautionary procedures should be in place for the handling and transporting of silicon tetrafluoride.   EFC handles silicon tetrafluoride according to strict safety standards to ensure it’s safe delivery and use. 

Is silicon tetrafluoride (SiF4) reactive?

Under normal conditions, silicon tetrafluoride is stable, but the stability can be affected by contact with water or moist air. The gas is not sensitive to mechanical impact or static discharge. In addition to being incompatible with air and moisture, silicon tetrafluoride is not compatible with alkaline earth metals. 

What substances should I keep away from silicon tetrafluoride (SiF4)?

Avoid contact between silicon tetrafluoride and the following: hydrochloric acid, sulfuric acid, nitric acid, sodium hydroxide, potassium hydroxide, alcohols, and alkali metals.

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

**RFO available

*This gas not available for purchase online.