Tetrafluoromethane (CF4)
Tetrafluoromethane (CF4) is a colorless, nonflammable, noncorrosive gas. It is normally compressed and shipped at high pressure.
Tetrafluoromethane
Formula: CF4
CAS No: 75-73-0
Tetrafluoromethane (CF4) is a colorless, non-flammable fluorocarbon gas widely used in semiconductor manufacturing and plasma processing. It is valued for its ability to generate fluorine radicals under plasma conditions, enabling efficient etching of silicon-based materials.
In semiconductor fabrication, CF4 is used for plasma etching of silicon, silicon dioxide, and silicon nitride. Its stability and performance in plasma systems support consistent process control and high-throughput manufacturing.
Applications include:
- Used in plasma etching of silicon, silicon dioxide, and silicon nitride.
- Applied in semiconductor manufacturing and microelectronics processing.
- Enables removal of dielectric and silicon-based materials.
- Used in surface treatment and plasma cleaning processes.
- Applied in specialty fluorination and research applications.
EFC Gases & Advanced Materials supplies high-purity tetrafluoromethane with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch silicon, SiO₂, and Si₃N₄.
- Support semiconductor manufacturing.
- Remove dielectric materials.
- Clean and treat surfaces with plasma.
- Use in fluorination and research.
| Purity | Grade 3.5 | Grade 4 | Grade 4.5 | Grade 5 |
|---|---|---|---|---|
| Purity Specifications | 99.95% | 99.99% | 99.995% | 99.999% |
| Nitrogen | < 400 ppmv | < 60 ppmv | < 30 ppmv | < 5 ppmv |
| Oxygen | < 100 ppmv | <20 ppmv | < 5 ppmv | < 1 ppmv |
| Carbon Monoxide | < 20 ppmv | < 5 ppmv | < 1 ppmv | < 0.5 ppmv |
| Carbon Dioxide | < 10 ppmv | < 5 ppmv | < 1 ppmv | < 2 ppmv |
| Moisture | < 10 ppmv | < 5 ppmv | < 5 ppmv | < 1 ppmv |
| Halocarbon 116 | < 1 ppmv | |||
| Other Halocarbons | < 50 ppmv | < 5 ppmv | < 5 ppmv | |
| Hydrocarbons | < 1 ppmv | |||
| Acidity | < 0.1 ppm/w | < 0.1 ppm/w | < 0.1 ppm/w |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 88.01 |
| Specific Volume | 4.39 cu.ft/lb |
| Pressure @ 70° F | 23.5 psig |
| Valve Outlet | CGA 580 CGA 320 |
| Shipping Information | |
|---|---|
| DOT Name | Tetrafluoromethane |
| Hazard Class | 2.2 |
| DOT No. | UN 1982 |
| DOT Label | Green, Non-Flammable Gas B |
| CAS No. | 75-73-0 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 440L/Y-Ton | 700 |
| 49L/Size 300 | 72 |
| 44L/Size 200 | 70 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 11 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
