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Sulfur Hexafluoride (SF6)

Sulfur Hexafluoride (SF6) is a colorless, odorless, non-toxic liquefied gas. Shipped as a liquid under its own vapor pressure.

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Sulfur Hexafluoride

Formula: SF6

What is Sulfur Hexafluoride (SF6)?

Sulfur Hexafluoride is a synthetic, fluorinated compound characterized by a highly stable molecular structure, consisting of six fluorine atoms attached to a central sulfur atom, and is known as an inert gas.

Industry Applications for Sulfur Hexafluoride:

SF6 has chemical properties that make it useful across a range of industries.

Electrical Industry:

SF6 is widely used in the electrical industry as a gaseous dielectric medium for insulating and arc quenching in switchgear, substations, and gas-insulated power lines. For this application, it is superior to many other substances due to its insulation properties, dielectric strength, and arc quenching abilities. We provide technical-grade SF6 gas that meets IEC 60376 and ASTM D2472-00 standards for this application.

Semiconductor Manufacturing:

Sulfur hexafluoride is also used for deep ion plasma etching in the production of semiconductors. SF6 will produce reactive ions and radicals in the plasma, essential for the etching process. We provide high-purity SF6 gas that meets the exacting standards of semiconductor manufacturing.

Metal Protection:

SF6 is used as a cover gas to protect molten reactive metals, including magnesium. Here the SF6 protects the hot metals from atmospheric oxygen, preventing oxidation and burning of the metal.

Thermal and Acoustic Insulation:

SF6 placed between the panes of a double-pane window will thermally insulate and acoustically insulate, reducing the sound transmitted. This is valuable for homes and businesses in noisy areas or for offices and conference rooms where privacy is desired.

Environmental Impact and Regulations

Due to its high global warming potential, SF6 is subject to stringent regulations and management practices to minimize its release into the atmosphere. Proper handling and recycling practices are essential to mitigate its environmental impact. As a supplier of SF6, EFC is dedicated to providing high-purity SF6 while adhering to the highest standards and actively contributing to efforts to reduce its ecological footprint.

Applications
Specifications
Further Specifications
Cylinder Sizes
  • Deep ion plasma etching in semiconductor manufacturing.
  • Gaseous insulator and arc quencher in high-voltage equipment.
  • Cover gas for molten reactive metals.
  • Thermal and acoustic insulator for double-pane windows.
Grade 3 Grade 4 Grade 5
Purity 99.9% 99.99% 99.999%
Nitrogen < 40 ppmv < 5 ppmv
Oxygen < 10 ppmv < 2 ppmv
Air (N2+O2) < 400 ppmv
CF4 < 100 ppmv < 15 ppmv < 5 ppmv
Water < 8 ppmv < 8 ppmv < 2 ppmv
Acidity (HF) < 1 ppmw < 0.5 ppmw < 0.1 ppmw
Chemical & Physical Properties
Molecular Weight 146.05 cu.ft/lb
Specific Volume 2.65 cu.ft/lb
Pressure @ 70º F 298 psig
Valve Outlet CGS 590 DISS 716
Shipping Information
DOT Name Sulfur Hexafluoride
Hazard Class 2.2
DOT No. UN 1080
DOT Label Green, Non-flammable gas
CAS no. 2551-62-4
Cylinder Size Fill Weight (lb)
Tube Trailer 28,000
44L/Size 200 115
16L/Size 80 35
7L/Size 35 18

FAQs about Sulfur Hexafluoride

Where is Sulfur Hexafluoride (SF6) found?

Sulfur Hexafluoride (SF6) is a synthetic gas produced by reacting elemental sulfur with elemental fluorine (F2) at approximately 300 ºC. After synthesis, the gas is purified by heating or alkali washing to remove other sulfur fluoride (SxFy) impurities​.

Can you buy Sulfur Hexafluoride (SF6)?

Yes, you can buy sulfur hexafluoride gas at EFC. We ship it as a liquid under its own vapor pressure in different cylinder sizes, including 44L/Size 200, 16L/Size 80, and 7L/Size 35.

Is Sulfur Hexafluoride (SF6) safe?

Sulfur hexafluoride is non-toxic, except when exposed to extreme temperatures. However, when breathed in, SF6 can irritate the lungs, causing coughing and shortness of breath. Higher exposures can lead to pulmonary edemas (a build-up of fluid in the lungs), which requires medical treatment. ​​EFC’s culture of safety ensures that sulfur hexafluoride is always handled correctly, safely, and according to industry standards.

Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.