Trifluoromethane Gas (CHF3)
Trifluoromethane (CHF3) is a colorless, nontoxic, non-flammable gas with a slightly ethereal odor.
Trifluoromethane
Formula: CHF3
CAS No: 75-46-7
Trifluoromethane (CHF3), also known as fluoroform (R-23), is a colorless, non-flammable gas used in semiconductor manufacturing and specialty industrial applications. It is valued for its ability to generate reactive fluorine species in plasma environments.
In semiconductor processing, CHF3 is used as an etching gas, particularly for silicon dioxide and dielectric materials. Its chemistry enables selective etching and profile control, making it useful in advanced microfabrication.
Applications include:
- Used in plasma etching of silicon dioxide and dielectric materials.
- Enables selective etching and profile control in semiconductor processes.
- Applied in chamber cleaning and residue removal.
- Used as a refrigerant (R-23) in specialized cooling systems.
- Applied in specialty fluorination and research applications.
EFC Gases & Advanced Materials supplies high-purity trifluoromethane with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch SiO₂ and dielectric materials.
- Control etch profiles in semiconductor processes.
- Clean process chambers and remove residues.
- Use in refrigeration (R-23).
- Support fluorination and research.
| Grade 3 | Grade 3.5 | Grade 4.5 | Grade 5 | |
|---|---|---|---|---|
| Purity | 99.9% | 99.95% | 99.995% | 99.999% |
| Air (N2+O2+CO+CO2) | <500 ppmv | < 400 ppmv | < 30 ppmv | < 5 ppmv |
| Moisture | < 10 ppm/w | < 10 ppmv | < 4 ppmv | < 2 ppmv |
| Other Organics | < 1000 ppmv | <10 ppmv | < 3 ppmv | |
| Methane | < 1 ppmv | |||
| Acidity (HF) | < 0.1 ppm/w | < 0.1 ppm/w | < 0.1 ppm/w | < 0.1 ppm/w |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 70.01 |
| Specific Volume | 5.5 cu. ft/lb |
| Pressure @ 70° F | 23.5 psig |
| Valve Outlet | CGA 660 CGA 320, DISS 716 |
| Shipping Information | |
|---|---|
| DOT Name | Trifluoromethane |
| Hazard Class | 2.2 |
| DOT No. | UN 1984 |
| DOT Label | Green, Non-Flammable Gas |
| CAS No. | 75-46-7 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 440L/ Y-Ton | 700 |
| 44L/Size 200 | 70 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 11 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
