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Methyl Fluoride

Methyl Fluoride is a colorless, flammable gas.

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Methyl Fluoride

Formula: CH3F, HC-41

What is Methyl Fluoride?

Methylfluoride (CH3F) can offer good selectivity to other materials in semiconductor etching. Selectivity refers to the ability of an etchant to preferentially remove one material over another while leaving the latter material largely unaffected.

What are some of the factors that can influence the selectivity of methyl fluoride in etching?

Surface chemistry:

The surface chemistry of the material being etched can affect the selectivity of CH3F. For example, the presence of surface groups like Si-H or Si-OH can lead to a lower selectivity to SiO2.

Etch parameters:

Etch parameters like gas flow rate, pressure, and power can affect the selectivity of CH3F. Adjusting these parameters can help to optimize the selectivity of the etch process.


The use of a mask, such as a photoresist or hard mask, can help to protect the material that is not being etched. The selectivity of CH3F can be improved by optimizing the masking process.

Chamber cleaning:

The selectivity of CH3F can be influenced by residual gases left in the etching chamber from previous etching or cleaning processes. Proper chamber cleaning can help to improve the selectivity of CH3F.

Overall, the selectivity of CH3F in etching can be influenced by various factors, and optimizing the etch process and equipment can help to achieve the desired selectivity. CH3F’s selectivity to silicon dioxide and other materials makes it a valuable tool in the semiconductor industry, helping to create high-quality structures and devices.

What are some other scientific applications for Methyl Fluoride?

Isotope labeling:

Methylfluoride can be used as a source of fluorine-18, a positron-emitting radioisotope used in medical imaging. Fluorine-18 can be incorporated into molecules through radiofluorination reactions, allowing for the labeling of molecules for use in positron emission tomography (PET) imaging.

High-pressure chemistry:

Methylfluoride can be used in high-pressure chemistry experiments, particularly as a pressure-transmitting medium in diamond anvil cells. Diamond anvil cells can generate pressures exceeding one million atmospheres, allowing for the study of materials under extreme conditions.

Plasma chemistry:

Methylfluoride can be used in plasma chemistry experiments, particularly as a precursor for the deposition of fluorinated films. Plasma-enhanced chemical vapor deposition (PECVD) using CH3F can produce thin films with properties suitable for various applications, such as protective coatings and antireflective coatings.


Methylfluoride can be used as a reference compound in spectroscopy experiments, particularly in the study of molecular vibrations. Its simple structure and well-characterized vibrational spectrum make it a useful reference material for various techniques, such as infrared and Raman spectroscopy.

Overall, Methylfluoride has various uses in scientific applications, demonstrating its usefulness in advancing research and understanding various phenomena.



Further Specifications

Cylinder Sizes

  • Used as a propellant in a mixture with other nonflammable propellants
  • For physico-chemical study of the C-F bond
Grade 4 Grade 4.5
Purity 99.99% 99.995%
Nitrogen < 70 ppmv < 20 ppmv
Oxygen < 20 ppmv << 5 ppmv
Carbon Dioxide < 10 ppmv
Carbon Monoxide < 10 ppmv
Methane < 5 ppmv
Water < 10 ppmv < 2 ppmv
Chemical & Physical Properties
Molecular Weight 34
Specific Volume 11.36 cu.ft/lb
Pressure @ 70° F 538 psig
Valve Outlet CGA 350 DISS 724
Shipping Information
DOT Name Methyl Fluoride
Hazard Class 2.1
DOT No. UN 2810
DOT Label Flammable Gas
CAS No. 593-53-3
Cylinder Size Fill Weight (lb)
44L/Size 200 33
16L/Size 80 7
7L/Size 35 3

FAQs about Methyl Fluoride

Is methyl fluoride gas safe?

Methyl fluoride can cause skin and eye irritation and respiratory asphyxiation; however, it is considered a non-toxic gas.   EFC’s culture of safety ensures that methyl fluoride is always handled correctly, safely, and according to industry standards. 

Why is methyl fluoride used instead of CFCs?

Chlorofluorocarbons (CFCs) damage the atmosphere by deleting the ozone layer.  Methyl fluoride can replace CFCs as an aerosol propellant or refrigerant because it functions similarly but does not contain chlorine. 

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
This product is analyzed liquid phase.

*This gas not available for purchase online.