Hexafluoroethane
Hexafluoroethane
Formula: C2F6, R-116, HC-116
CAS No: 76-16-4
Hexafluoroethane (C2F6), also known as R-116 and perfluoroethane, is a chemically inert, nonflammable, and nontoxic fluorinated haloalkane with a very high Global Warming Potential (GWP = 11,100; IPCC AR5). Highly stable and non-reactive under normal conditions, it is critical in both specialty industrial processes and semiconductor manufacturing.
Applications include:
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Component in refrigeration mixtures where it contributes to stable low-temperature performance and consistent system efficiency.
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Process gas for reactive ion etching in semiconductor manufacturing, providing a high fluorine-to-carbon ratio for aggressive and precise dielectric and metal layer etching.
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Chamber cleaning agent in semiconductor fabrication, removing polymeric and inorganic residues to maintain contamination-free processing environments.
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Expansion agent for polyolefins and polyurethanes, creating controlled porosity for improved insulation, lighter weight, and material efficiency.
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Propellant for aerosol products, offering an inert, nonflammable medium for specialty formulations.
EFC Gases & Advanced Materials supplies high-purity hexafluoroethane for semiconductor, electronics, and advanced manufacturing applications. Our rigorous analytical verification, precision packaging, and controlled logistics ensure consistent quality from production to point-of-use.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch semiconductor materials in reactive ion etching (RIE) processes.
- Clean plasma chambers in semiconductor fabrication.
- Blend into specialty refrigeration mixtures.
- Expand polyolefins and polyurethanes in foaming applications.
- Propel aerosol products and act as a fire suppression agent.
| Grade 4.5 | Grade 5 | |
|---|---|---|
| Purity | 99.995% | 99.999% |
| Nitrogen | <10 ppmv | < 5 ppmv |
| Oxygen | < 5 ppmv | < 1 ppmv |
| Carbon Monoxide | < 1 ppmv | < 1 ppmv |
| Carbon Dioxide | < 2 ppmv | < 1 ppmv |
| Moisture | < 5 ppmv | < 1 ppmv |
| Other Organics | < 25 ppmv | < 1 ppmv |
| Acidity (HF) | < 0.1 ppmv | < 0.1 ppmv |
| Chemical & Physical | |
|---|---|
| Molecular Weight | 138.01 |
| Specific Volume | 2.8 cu.ft/lb |
| Pressure @ 70ºF | 23.5 psig |
| Valve Outlet | CGA 660/320 DISS 716 |
| Shipping Information | |
|---|---|
| DOT Name | Hexafluoroethane |
| Hazard Class | 2.2 |
| DOT No. | UN 2193 |
| DOT Label | Green, Non-flammable gas |
| CAS No | 76-16-4 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 95 |
| 16L/Size 80 | 34 |
| 7L/Size 35 | 15 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
