Hexafluorobutadiene
Hexafluorobutadiene
Formula: C4F6, HFBD
CAS No: 685-63-2
Hexafluorobutadiene (C4F6) is a fluorinated hydrocarbon widely used in semiconductor manufacturing, valued for its low Global Warming Potential (GWP), high etch rates, excellent selectivity, and ability to produce high-aspect ratio features. Its unique reactivity makes it an important material in advanced device fabrication where precision and performance are critical.
Applications include:
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Reactive ion etching (RIE) of semiconductor materials with high selectivity and vertical profile control.
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Deep reactive ion etching (DRIE) for forming high-aspect ratio structures with sidewall passivation.
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Plasma-enhanced chemical vapor deposition (PECVD) of conformal fluorinated films.
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Plasma chamber cleaning to remove deposits and maintain process stability.
EFC Gases & Advanced Materials supplies high-purity hexafluorobutadiene with rigorous analytical verification to meet the demanding requirements of semiconductor etching, deposition, and cleaning processes. Controlled packaging, handling, and logistics ensure consistent quality and safe delivery from production to point-of-use.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch semiconductor materials via reactive ion etching (RIE).
- Form high-aspect ratio structures in deep reactive ion etching (DRIE).
- Deposit conformal fluorinated films with PECVD.
- Clean plasma chambers in etching and deposition tools.
| Grade 3 | Grade 4 | |
|---|---|---|
| Purity | 99.9% | 99.99% |
| Nitrogen | < 200 ppmv | < 40 ppmv |
| Oxygen, Argon | < 100 ppmv | < 10 ppmv |
| Carbon Dioxide | < 100 ppmv | < 20 ppmv |
| Moisture | < 20 ppmv | < 20 ppmv |
| Other Fluorocarbons | < 800 ppmv | < 200 ppmv |
| Isopropylalcohol | < 50 ppmv | < 20 ppmv |
| Other Hydrocarbons | < 500 ppmv | < 250 ppmv |
| Hydrogen Fluoride | < 50 ppmv | <10 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 162.034 |
| Pressure @ 70°F | 25 psig |
| Valve Outlet | CGA 350 DISS 724 |
| Shipping Information | |
|---|---|
| DOT Name | 1,3 Hexafluorobutadiene |
| Hazard Class | 2.3, 2.1 |
| DOT No. | UN 3160 |
| DOT Label | Toxic, Flammable, Inhalation Hazard Zone B |
| CAS No. | 685-63-2 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 99 |
| 16L/Size 80 | 30 |
| 7L/Size 35 | 11 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
