Fluorine
Fluorine
Formula: F2
Fluorine (F2) is a pale yellow, highly reactive gas with a pungent odor. It is the most electronegative and reactive of all elements, capable of forming compounds with nearly all other elements. Due to its extreme reactivity, fluorine is produced, stored, and handled under strict safety controls, and is supplied in high-purity grades for critical industrial and scientific applications.
Applications include:
-
Plasma etching of semiconductor materials, including silicon and compound semiconductors.
-
Cleaning and conditioning of chemical vapor deposition (CVD) and plasma-enhanced CVD (PECVD) chambers.
-
Production of uranium hexafluoride (UF6) for nuclear fuel processing.
-
Manufacture of fluorinated specialty chemicals, including fluoropolymers and fluorinated pharmaceuticals.
-
Surface modification and activation in materials science and advanced coatings.
Material Compatibility
Fluorine is extremely reactive and will attack most organic materials and many metals. Under dry conditions, certain metals such as nickel, Monel®, and copper develop a protective fluoride layer that can be compatible for containment. Avoid aluminum, carbon steel, and other readily attacked metals.
Note on Shipping Costs:
Transporting fluorine gas can be significantly more expensive than shipping other specialty gases. The U.S. Department of Transportation (DOT) and related regulatory agencies impose strict requirements due to fluorine’s extreme reactivity and hazard potential. These costs are driven by:
-
Use of specialized UN/DOT-approved cylinders designed for highly reactive gases.
-
Specialized handling by trained personnel and comprehensive safety procedures.
-
Enhanced emergency response readiness during transit.
Some facilities offset these costs by implementing on-site fluorine generation systems, eliminating the need to ship large quantities of compressed fluorine.
EFC Gases & Advanced Materials supplies high-purity fluorine gas to meet the stringent requirements of semiconductor, nuclear, and specialty chemical industries. Our advanced analytical verification, specialized containment systems, and secure logistics ensure safe, consistent delivery from production to point-of-use.
Applications
Specifications
Cylinder Sizes
- Etch semiconductor and compound semiconductor materials.
- Clean and condition CVD and PECVD chambers.
- Produce uranium hexafluoride for nuclear fuel.
- Manufacture fluorinated specialty chemicals.
- Modify and activate surfaces for advanced coatings.
| Cylinder Size | Fill Volume |
|---|---|
| 49L/Size 300 | 10,000 |
| 44L/Size 200 | 7,000 |
| 16L/Size 80 | 2,000 |
| 7L/Size 35 | 500 |
