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Boron Trichloride

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Boron Trichloride

Formula: BCl3

CAS No: 10294-34-5

Boron Trichloride (BCl3) is a liquefied gas that hydrolyzes in water to form hydrogen chloride and boric acid. It is an essential process gas in advanced semiconductor manufacturing, high-performance metallurgy, and specialty chemical production.

Applications include:

  • Plasma etching and cleaning in semiconductor and electronics manufacturing, including high-k and metal anisotropic plasma etching, atomic layer etching, and pulsed plasma etching.

  • Fine etching of aluminum circuits in LCD and flat-panel display production.

  • Etching compound semiconductors such as GaAs, GaN, and InP in advanced device fabrication.

  • Treatment of molten aluminum to improve casting quality by removing impurities.

  • Soldering flux for alloys of aluminum, iron, zinc, tungsten, and Monel®.

  • Chlorinating agent and boron source in the synthesis of high-purity boron halides, organoboron compounds, and specialty chemicals.

Additional uses:

  • Deposition of uniform carbon films on ceramic substrates for electrical resistor manufacturing.

  • Source of boron in high-energy fuels and rocket propellants to boost BTU output.

  • Plasma cleaning gas for deposition chambers in semiconductor manufacturing.

  • Catalyst or reactant in advanced materials processing.

Material compatibility:
Equipment handling BCl3 is typically constructed from stainless steel, Monel®, or Hastelloy®. In the presence of moisture, BCl3 hydrolyzes to hydrogen chloride (HCl) and boric acid. The HCl is corrosive to carbon steel and can attack stainless steels over time. BCl3 also reacts with polyamides. Systems should be kept dry and properly passivated, with appropriate seals and gaskets to minimize corrosion risk.

EFC Gases & Advanced Materials supplies high-purity BCl3 for critical semiconductor, electronics, metallurgical, and specialty chemical applications. Our rigorous analytical verification, safe packaging, and controlled logistics ensure product integrity from production to delivery.

Applications
Specifications
Further Specifications
Cylinder Sizes
  • Etch semiconductors and LCD circuits.
  • Refine molten aluminum to remove impurities.
  • Flux alloys for stronger, cleaner solder joints.
  • Synthesize boron compounds and specialty chemicals.
Grade 4.5 Grade 5 Grade 5.5
Purity 99.995% 99.999% 99.9995%
Oxygen < 9 ppmv < 1 ppmv < 0.5 ppmv
Nitrogen < 30 ppmv < 4 ppmv < 0.5 ppmv
Carbon Dioxide < 5 ppmv < 2 ppmv < 0.5 ppmv
Carbon Monoxide < 3 ppmv < 0.5 ppmv < 0.3 ppmv
Methane < 1 ppmv < 0.5 ppmv < 0.5 ppmv
Chlorine <1 ppmv < 1 ppmv < 0.1 ppmv
Phosgene < 0.1 ppmv
Hydrogen Chloride < 1 ppmv
Silicon Tetrachloride < 2 ppmv
Chemical & Physical Properties
Molecular Weight 117.17
Sp. Volume 3.3 cu.ft/lb
Pressure @ 70°F 4.4 psig
Valve Outlet CGA 660 DISS 634
Shipping Information
DOT Name Boron Trichloride
Hazard Class 2.3
DOT No. UN 1741
DOT Label Poison Gas/Inhalation Hazard, Corrosive Gas
CAS No. 10294-34-5
Cylinder Size Fill Weight (lb)
44L/Size 200 110
2L/Size 10 5

Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.