Arsine
Arsine
Formula: AsH3
CAS No: 7784-42-1
Arsine (AsH3) is a colorless, non-irritating, yet highly toxic gas with a faint garlic-like odor. It is one of the simplest arsenic compounds and a critical electronic gas used in semiconductor and optoelectronic device manufacturing. Highly flammable and potentially explosive, arsine can be ignited by heat, open flame, or sparks. It is soluble in water, has a boiling point of –62.5 °C, and is typically supplied in cylinders as a compressed liquefied gas under strict safety controls.
Applications include:
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Dopant gas for ion implantation in semiconductor manufacturing, particularly in III-V compound semiconductors such as gallium arsenide (GaAs).
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Manufacturing of optoelectronic devices including LEDs, laser diodes, and photodetectors.
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Production of high-efficiency photovoltaic materials for solar cells.
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Epitaxial growth processes such as metal-organic chemical vapor deposition (MOCVD) and molecular beam epitaxy (MBE).
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Precursor in the synthesis of certain organoarsenic compounds for research and industrial use.
EFC Gases & Advanced Materials supplies high-purity arsine to meet the stringent requirements of semiconductor, optoelectronics, and specialty chemical applications. Our rigorous analytical verification, controlled packaging, and secure logistics ensure product integrity from production to point-of-use.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Dope semiconductors in ion implantation processes.
- Manufacture LEDs, laser diodes, and photodetectors.
- Produce high-efficiency photovoltaic materials.
- Grow epitaxial layers via MOCVD and MBE.
- Synthesize organoarsenic compounds for research and industry.
| Grade 5.5 | Grade 6 | Grade 6.5 | |
|---|---|---|---|
| Purity | 99.9995% | 99.9999% | 99.99995% |
| Water | < 2 ppmv | < 350 ppbv | < 100 ppbv |
| Nitrogen | < 2 ppmv | < 250 ppbv | < 50 ppbv |
| Oxygen | < 1 ppmv | < 40 ppbv | < 20 ppbv |
| Carbon Dioxide | < 0.5 ppmv | < 40 ppbv | < 10 ppbv |
| Carbon Monoxide | < 0.1 ppmv | < 10 ppbv | < 10 ppbv |
| Methane | < 0.5 ppmv | ||
| C1-C2 | < 500 ppbv | < 100 ppbv | |
| Argon | < 50 ppbv | < 50 ppbv | |
| Germane | < 50 ppbv | < 50 ppbv | |
| Hydrogen Sulfide | < 50 ppbv | ||
| Silane | < 50 ppbv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 77.95 |
| Specific Volume | 5.0 cu. ft/lb |
| Pressure @ 70° F | 204.6 psig |
| Valve Outlet | CGA 350 DISS 632 |
| Shipping Information | |
|---|---|
| DOT Name | Arsine |
| Hazard Class | 2.3 |
| DOT No. | UN 2188 |
| DOT Label | Poison Gas/Inhalation Hazard, Flammable Gas |
| CAS No. | 7784-42-1 |
| Cylinder Size | Fill Weight (lbs) |
|---|---|
| 44L/Size 200 | 55 |
| 265 AL | 60/40 |
| 150 AL | 28 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
