Neon
Neon is a colorless, odorless, nonflammable gas.
Neon
Formula: Ne
CAS No: 7440-01-9
Neon (Ne) is a high-purity noble gas used as a critical component in semiconductor manufacturing and advanced laser systems. As an inert gas with a high ionization potential, neon enables stable energy transfer in applications requiring precise control and minimal chemical interaction.
In semiconductor fabrication, neon is primarily used as a buffer gas in excimer laser mixtures for deep ultraviolet (DUV) photolithography. These systems rely on neon to generate the short-wavelength ultraviolet light required to pattern advanced microelectronic devices with nanometer-scale precision.
Applications include:
- Primary buffer gas in excimer laser mixtures (KrF, ArF, XeCl) used to generate deep ultraviolet (DUV) light for semiconductor photolithography.
- Used in helium-neon lasers, precision optics, and research applications.
- Applied in lighting, cryogenic refrigeration, and specialty industrial processes.
EFC Gases & Advanced Materials supplies high-purity neon gase with tight control of moisture and critical impurities to ensure consistent performance in demanding applications. Through its Rare Gas Center of Excellence, we provide advanced purification and global supply capabilities for neon, supporting semiconductor, laser, lighting, and other high-specification applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Support excimer laser mixtures (KrF, ArF, XeCl) for DUV semiconductor lithography.
- Operate He-Ne lasers and optical systems.
- Use in lighting, refrigeration, and specialty applications.
| Grade 5 | |
|---|---|
| Purity | 99.999% |
| Nitrogen | < 2 ppmv |
| Oxygen | < 0.5 ppmv |
| Carbon Monoxide | < 0.5 ppmv |
| Carbon Dioxide | < 0.5 ppmv |
| Moisture | < 1 ppmv |
| Helium | < 5 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 20.18 |
| Specific Volume | 19.21 cu.ft/lb |
| Pressure @ 70°F | 2,400 psig |
| Valve Outlet | CGA 580 |
| Shipping Information | |
|---|---|
| DOT Name | Neon |
| Hazard Class | 2.2 |
| DOT No. | UN 1065 |
| DOT Label | Green, non-flammable gas |
| CAS No. | 7440-01-9 |
| Cylinder Size | Fill Volume (L) |
|---|---|
| 49L/Size 300 | 7,500 |
| 44L/Size 200 | 6,000 |
| 44L/Size 200 | 5,000 |
| 16L/Size 80 | 2,000 |
| 16L/Size 80 | 1,000 |
| 5.9L/Size 33A | 500 |
| 3.9L/Size 22A | 250 |
| 2.7L/Size 9A | 100 |
| 0.5L/Lecture Bottle | 50 |
| 0.5L/Lecture Bottle | 25 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.