Sulfur Hexafluoride (SF6)
Sulfur Hexafluoride (SF6) is a colorless, odorless, non-toxic liquefied gas. Shipped as a liquid under its own vapor pressure.
Sulfur Hexafluoride
Formula: SF6
CAS No: 2551-62-4
Sulfur Hexafluoride (SF6) is a colorless, non-flammable gas known for its exceptional dielectric properties and chemical stability. It is widely used in electrical power systems and semiconductor manufacturing due to its ability to insulate and quench electrical arcs.
In semiconductor processing, SF6 is used as a plasma etching gas, where it generates reactive fluorine species that enable efficient removal of silicon and related materials. Its performance in both electrical and plasma environments makes it a critical gas in advanced industrial applications.
Applications include:
- Used as a dielectric gas in high-voltage electrical equipment such as circuit breakers and GIS systems.
- Applied in plasma etching of silicon and semiconductor materials.
- Enables arc quenching and insulation in power transmission systems.
- Used in leak detection and tracer gas applications.
- Applied in specialty industrial and research environments.
EFC Gases & Advanced Materials supplies high-purity sulfur hexafluoride with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Insulate high-voltage electrical equipment.
- Etch silicon and semiconductor materials.
- Quench electrical arcs in power systems.
- Detect leaks and trace gas movement.
- Support specialty industrial applications.
| Grade 3 | Grade 4 | Grade 5 | |
|---|---|---|---|
| Purity | 99.9% | 99.99% | 99.999% |
| Nitrogen | < 40 ppmv | < 5 ppmv | |
| Oxygen | < 10 ppmv | < 2 ppmv | |
| Air (N2+O2) | < 400 ppmv | ||
| CF4 | < 100 ppmv | < 15 ppmv | < 5 ppmv |
| Water | < 8 ppmv | < 8 ppmv | < 2 ppmv |
| Acidity (HF) | < 1 ppmw | < 0.5 ppmw | < 0.1 ppmw |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 146.05 cu.ft/lb |
| Specific Volume | 2.65 cu.ft/lb |
| Pressure @ 70º F | 320 psig |
| Valve Outlet | CGS 590 DISS 716 |
| Shipping Information | |
|---|---|
| DOT Name | Sulfur Hexafluoride |
| Hazard Class | 2.2 |
| DOT No. | UN 1080 |
| DOT Label | Green, Non-flammable gas |
| CAS no. | 2551-62-4 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| Tube Trailer | 28,000 |
| 44L/Size 200 | 115 |
| 16L/Size 80 | 35 |
| 7L/Size 35 | 18 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
