Octafluoropropane
Octafluoropropane (FC-218), also known as perfluoropropane, is a colorless, nonflammable and nontoxic gas.
Octafluoropropane
Formula: C3F8
CAS No: 76-19-7
Octafluoropropane (C3F8) is a colorless, non-flammable fluorocarbon gas used in semiconductor manufacturing, medical applications, and specialty industrial processes. It is valued for its chemical stability and ability to generate fluorine-containing plasmas.
In semiconductor processing, C3F8 is used for plasma etching and chamber cleaning, where it produces reactive species capable of removing silicon-based materials and residues. Its behavior in plasma systems supports consistent process control and repeatability.
Applications include:
- Used in plasma etching of silicon, silicon dioxide, and related materials.
- Applied in chamber cleaning processes in semiconductor manufacturing.
- Enables removal of fluorocarbon residues and process byproducts.
- Used in medical applications such as retinal surgery (gas tamponade).
- Applied in specialty fluorination and industrial processes.
EFC Gases & Advanced Materials supplies high-purity octafluoropropane with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Etch silicon, SiO₂, and related materials.
- Clean semiconductor process chambers.
- Remove fluorocarbon residues.
- Support medical procedures (retinal applications).
- Use in fluorination and specialty processes.
| Grade 3.6 | Grade 3.7 | Grade 4 | |
|---|---|---|---|
| Purity | 99.96% | 99.97% | 99.99% |
| Nitrogen | < 200 ppmv | < 145 ppmv | < 40 ppmv |
| Oxygen | < 50 ppmv | < 50 ppmv | < 10 ppmv |
| Carbon Monoxide | < 5 ppmv | < 5 ppmv | |
| Carbon Dioxide | < 10 ppmv | < 11 ppmv | <5 ppmv |
| Moisture | < 10 ppmv | < 6 ppmv | < 10 ppmv |
| Other Halocarbons | < 100 ppmv | < 400 ppmv | < 40 ppmv |
| Light Gases | < 200 ppmv | ||
| Acidity | < 0.1 ppmvw | < 0.1 ppmw |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 188.02 |
| Specific Volume | 2.02 cu.ft/lb |
| Pressure @ 70ºF | 23.5 psig |
| Valve Outlet | CGA 660 DISS 716 |
| Shipping Data | |
|---|---|
| DOT Name | Octafluoropropane |
| Hazard Class | 2.2 |
| DOT No. | UN 2424 |
| DOT Label | Green, Non-flammable gas |
| CAS No. | 76-19-7 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 100 |
| 16L/Size 80 | 35 |
| 7L/Size 35 | 15 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
