Xenon (Xe)
Xenon (Xe) is a colorless, odorless, nonflammable noble gas.
Xenon
Formula: Xe
CAS No: 7440-63-3
Xenon (Xe) is a high-purity noble gas used in semiconductor manufacturing, lighting, medical imaging, and advanced propulsion systems. Its inert nature and high atomic weight enable unique optical, electrical, and ionization properties in high-performance applications.
In semiconductor fabrication, xenon is used in excimer laser systems and ion implantation processes, where it supports precise material modification and advanced lithography. Its role in high-energy systems makes it critical to next-generation device manufacturing.
Applications include:
- Used in excimer laser systems for semiconductor lithography.
- Applied in ion implantation processes for material modification.
- Used in high-intensity lighting and flash lamps.
- Applied in medical imaging and anesthesia applications.
- Used in aerospace propulsion systems and specialty research.
At EFC Gases & Advanced Materials, we apply our rare gas expertise and global supply capabilities to provide xenon at the highest purity and reliability. With advanced analytical resources and proven industry experience, we deliver xenon solutions that enable progress in aerospace, insulation, semiconductors, lighting, and laser technologies.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Support excimer lasers for semiconductor lithography.
- Enable ion implantation processes.
- Power high-intensity lighting systems.
- Support medical imaging and anesthesia.
- Use in propulsion and advanced research.
| Grade 4.5 | Grade 5 | Grade 5.5 | |
|---|---|---|---|
| Purity | 99.995% | 99.999% | 99.9995% |
| Nitrogen | <5 ppmv | < 4 ppmv | < 1 ppmv |
| Oxygen | < 2 ppmv | < 1 ppmv | < 0.1 ppmv |
| Carbon Monoxide | < 1 ppmv | < 0.5 ppmv | < 0.2 ppmv |
| Carbon Dioxide | < 1 ppmv | < 0.5 ppmv | < 0.2 ppmv |
| Moisture | < 2 ppmv | < 1 ppmv | < 0.5 ppmv |
| Total Hydrocarbons | < 1 ppmv | < 0.5 ppmv | < 0.1 ppmv |
| Krypton | <25 ppmv | < 3 ppmv | < 2 ppmv |
| Total Fluorocarbons | < 0.1 ppmv | ||
| Argon | < 1 ppmv | < 1 ppmv | |
| Hydrogen | < 1 ppmv | < 2 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 131.1 |
| Specific Volume | 2.9 cu.ft/lb |
| Pressure @ 70° F | 1000 psia |
| Valve Outlet | CGA 580 |
| Shipping Information | |
|---|---|
| DOT Name | Xenon |
| Hazard Class | 2.2 |
| DOT No. | UN 2036 |
| DOT Label | Green, Non-Flammable Gas |
| CAS No. | 7440-63-3 |
| Cylinder Size | Fill Volume (L) |
|---|---|
| 49L/Size 300 | 10,000 |
| 44L/Size 200 | 7,500 |
| 44L/Size 200 | 5,000 |
| 16L/Size 80 | 2,000 |
| 5.9L/Size 33A | 1,000 |
| 3.9L/Size 22A | 500 |
| 1.7L/Size 9A | 500 |
| 1.7L/Size 9A | 250 |
| 1.7L/Size 9A | 100 |
| 0.5L/Lecture Bottle | 50 |
| 0.5L/Lecture Bottle | 25 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
