Silane (SiH4)
Silane is a colorless, flammable gas with a sharp smell.
Silane
Formula: SiH4
CAS No: 7803-62-5
Silane (SiH4) is a colorless, pyrophoric gas widely used in semiconductor manufacturing and photovoltaic production. It is a key precursor for depositing silicon-containing films in chemical vapor deposition (CVD) processes.
In semiconductor fabrication, silane is used to deposit amorphous and polycrystalline silicon layers, as well as silicon nitride and silicon dioxide films. Its high reactivity enables efficient film growth and precise control over material properties in advanced device structures.
Applications include:
- Primary precursor for chemical vapor deposition (CVD) of silicon films in semiconductor manufacturing.
- Used to deposit amorphous and polycrystalline silicon layers for electronic devices and displays.
- Enables formation of silicon dioxide and silicon nitride films with controlled properties.
- Applied in photovoltaic manufacturing for silicon-based solar cells.
- Used in chemical vapor deposition (CVD) of coatings on glass, including on-line float glass coating systems.
Material Considerations
Silane requires clean, dry, and compatible system materials to prevent unwanted reactions and ensure safe delivery. Materials must support pyrophoric gas handling and maintain system integrity under highly reactive conditions.
EFC Gases & Advanced Materials supplies high-purity silane gas with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Deposit silicon films via CVD.
- Produce amorphous and polycrystalline silicon.
- Form Si₃N₄ and SiO₂ layers.
- Manufacture solar cells and displays.
- Deposit coatings on glass.
| Grade 5 | Grade 6 | |
|---|---|---|
| Purity | 99.999% | 99.9999% |
| Nitrogen | < 5 ppmv | < 0.5 ppmv |
| Oxygen + Argon | < 0.5 ppmv | < 0.06 ppmv |
| Carbon Dioxide | < 0.5 ppmv | < 0.05 ppmv |
| Carbon Monoxide | < 0.5 ppmv | < 0.08 ppmv |
| Hydrogen | < 20 ppmv | |
| Moisture | < 2 ppmv | < 0.5 ppmv |
| Helium | < 5 ppmv | < 1 ppmv |
| Methane | < 0.5 ppmv | < 0.04 ppmv |
| THC (Sum of C2-C4) | < 0.1 ppmv | |
| Total Chlorosilanes | < 0.5 ppmv | < 0.1 ppmv |
| Disilane | < 0.5 ppmv | |
| Disiloxane | < 0.5 ppmv | |
| Resistivity, N-Type | > 7,500 ohm-cm | > 10,000 ohm-cm |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 32.12 |
| Specific Volume | 12.1 cu. ft/lb |
| Pressure @ 70°F | 275-1250 psig |
| Valve Outlet | CGA 250 DISS 632 |
| Shipping Information | |
|---|---|
| DOT Name | Silane |
| Hazard Class | 2.1 |
| DOT No. | UN 2203 |
| DOT Label | Flammable Gas |
| CAS No. | 7803-62-5 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| 44L/Size 200 | 22 |
| 150 AL | 11 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
*RFO available
