Nitrogen Trifluoride
Nitrogen Trifluoride is a colorless, non-flammable, corrosive gas.
Nitrogen Trifluoride
Formula: NF3
CAS No: 7783-54-2
Nitrogen Trifluoride (NF3) is a colorless, non-flammable, toxic gas widely used in semiconductor and electronics manufacturing. It is valued for its ability to generate reactive fluorine species under plasma conditions, enabling efficient cleaning and etching of silicon-based materials.
In semiconductor fabrication, NF3 is primarily used for chamber cleaning and plasma etching processes. When dissociated in plasma, it produces fluorine radicals that effectively remove silicon, silicon dioxide, silicon nitride, and other residues, supporting high-yield device production and consistent process performance.
Applications include:
- Primary cleaning gas for PECVD and other deposition chambers in semiconductor manufacturing.
- Used in plasma etching to remove silicon, silicon dioxide, and silicon nitride layers.
- Supports production of flat panel displays, LEDs, and microelectronics.
- Applied in thin-film solar cell manufacturing for cleaning and etching processes.
- Used in specialty fluorination and advanced electronics processing applications.
EFC Gases & Advanced Materials supplies high-purity nitrogen trifluoride with tight control of moisture and critical impurities to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Clean semiconductor process chambers.
- Etch silicon, SiO₂, and Si₃N₄ materials.
- Support flat panel and LED manufacturing.
- Enable solar cell production processes.
- Use in fluorination and specialty electronics applications.
| Grade 2.7 | Grade 4 | Grade 4.5 | |
|---|---|---|---|
| Purity | 99.7% | 99.99% | 99.995% |
| Oxygen | < 10 ppmv | < 5 pmmv | |
| Oxygen and Argon | < 700 ppmv | ||
| Nitrogen | < 700 ppmv | < 10 ppmv | < 5 ppmv |
| Carbon Dioxide | < 25 ppmv | < 10 ppmv | < 3 ppmv |
| Carbon Monoxide | < 25 ppmv | < 0.5 ppmv | |
| Water | < 1 ppmv | < 1 ppmv | < 1 ppmv |
| Carbon Tetrafluoride | < 1,500 ppmv | < 40 ppmv | < 25 ppmv |
| Nitrous Oxide | < 50 ppmv | < 10 ppmv | < 2 ppmv |
| Acidity (HF) | < 1 ppmv | < 5 ppmv | < 1 ppmv |
| Sulfur Hexafluoride | < 50 ppmv | < 1 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 71.00 |
| Specific Volume | 5.4 cu.ft/lb |
| Pressure @ 70°F | 1450 psig |
| Valve Outlet | CGA 670 DISS 640 |
| Shipping Information | |
|---|---|
| DOT Name | Nitrogen Trifluoride |
| Hazard Class | 2.2 |
| DOT No. | UN 2451 |
| DOT Label | Non-Flammable Gas and Oxidizer |
| CAS No. | 7783-54-2 |
| Cylinder Size | Fill Weight (lb) |
|---|---|
| Tube Trailer | 17,637 |
| 49L/Size 300 | 50 |
| 44L/Size 200 | 44 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
