Nitric Oxide
Nitric Oxide is a colorless, corrosive, poisonous, oxidizing gas.
Nitric Oxide
Formula: NO
CAS No: 10102-43-9
Nitric Oxide (NO) is a colorless, toxic, and highly reactive gas used across semiconductor manufacturing, chemical production, and medical applications. As a free radical species, nitric oxide enables controlled reactions in processes requiring precise oxidation, doping, and surface modification.
In semiconductor fabrication, nitric oxide is used in etching, oxidation, and ion implantation processes, where it facilitates selective reactions and contributes to the formation of thin oxide layers and tailored electrical properties. Its reactivity and ability to influence material behavior make it a valuable process gas in advanced device manufacturing.
Applications include:
- Used in semiconductor manufacturing for etching, oxidation, and ion implantation processes.
- Enables formation of thin oxide layers and modification of electrical properties in advanced devices.
- Serves as an intermediate in the production of nitric acid for fertilizers, explosives, and industrial chemicals.
- Used in medical applications as an inhalation gas to improve oxygenation and treat respiratory conditions.
- Applied in research, calibration gas mixtures, and environmental monitoring systems.
Material Considerations
Nitric oxide can oxidize to nitrogen dioxide in the presence of oxygen, introducing corrosive conditions. Systems should be designed to limit oxidation and use materials compatible with both NO and potential NO2 exposure.
EFC Gases & Advanced Materials supplies high-purity nitric oxide with tight control of moisture and critical impurities, supported by rigorous analytical verification to ensure consistent performance in demanding applications.
Applications
Specifications
Further Specifications
Cylinder Sizes
- Support etching, oxidation, and ion implantation in semiconductor processes
- Form thin oxide layers and modify electrical properties
- Produce nitric acid for chemical manufacturing
- Treat respiratory conditions in medical applications
- Use in calibration gases and environmental monitoring
| Grade 2.5 | Grade 3 | Grade 3.5 | Grade 4 | |
|---|---|---|---|---|
| Purity | 99.5% | 99.9% | 99.95% | 99.99% |
| Oxygen | < 1 ppmv | |||
| Nitrogen | < 3,000 ppmv | < 500 ppmv | < 100 ppmv | < 30 ppmv |
| Carbon Dioxide | < 1,000 ppmv | < 100 ppmv | < 50 ppmv | < 1 ppmv |
| THC (CH4) | < 1 ppmv | |||
| Water | < 20 ppmv | < 5 ppmv | < 2 ppmv | < 1 ppmv |
| Hydrogen | < 1 ppmv | |||
| Nitrous Oxide | < 1,000 ppmv | < 500 ppmv | < 50 ppmv | < 30 ppmv |
| Nitrogen Dioxide | < 100 ppmv | < 100 ppmv | < 30 ppmv |
| Chemical & Physical Properties | |
|---|---|
| Molecular Weight | 30.01 |
| Sp. Volume | 12.8 cf/lb |
| Pressure @ 70°F | 500 psig |
| Valve Outlet | CGA 660 LB CGA 728 |
| Shipping Information | |
|---|---|
| DOT Name | Nitric Oxide Compressed |
| Hazard Class | 2.3 |
| DOT No. | UN 1660 |
| DOT Label | Inhalation Hazard, Oxidizer, Corrosive Gas |
| CAS No. | 10102-43-9 |
| Cylinder Size | Fill Volume (cu ft) |
|---|---|
| 44L/Size 200 | 56 |
Moisture level guaranteed only when EFC Gases & Advanced Materials prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated. Product sold on the basis of total impurities. Individual impurities may vary slightly.
